Integral lens for high energy particle flow, method for producing such lenses use thereof in analysis devices and devices for radiation therapy and lithography

ABSTRACT

The invention makes possible to increase the degree of radiation focusing by the lens, to use particles of higher energies, and to increase the coefficients, depending on these factors, of the devices, the lens is used in. Thus the sublens  18  of the least degree of integration represents a package of the channels  5 , which is growing out of joint drawing and forming the capillaries, which are laid in a bundle. The sublens of each higher degree of integration represents a package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming. The sublenses are growing out of performing the said operations at the pressure of the gaseous medium inside the channels being higher than the pressure in the space between the sublenses of the previous degree of integration and at the temperature of their material softening and splicing the walls. To produce the lenses a bundle of stocks (capillaries) in a tubular envelope is fed to the furnace (at the first stage) or stocks, produced on the previous degree, and the bundle is drawing from the furnace at the speed, exceeding the speed of feeding. The product is cut off on stocks for the next stage, and at the final stage the product is formed by varying the drawing speed, after what the parts with formed barrel-shaped thickenings are cut of.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to radiation lenses and, moreparticularly, to x-ray lenses comprising a plurality of sub-lenses drawntogether which is useful in flaw detection and diagnostics inengineering and medicine.

2. Description of the Prior Art

The usage of different types of radiation (X-rays, gamma ray, neutral orcharged particle radiation) in different fields, such as instrumentmaking, medicine, microelectronics, etc., considerably broadened for thelast 20-30 years. More powerful X-ray and safe neutron sources are made.These sources help to solve important fundamental and applied tasks ofscience and industry.

Unfortunately, x-ray sources are very expensive. To build such sources,as does the European Center for Synchrotron Radiation (Greno{grave over(b)}le, France), several states must cooperate. Therefore it is veryimportant to create optical devices, which can significantly increaseeffective luminance of cheap and available sources.

In the late eighties—early nineties of 20 century the lenses forcontrolling X-rays and other high-energy radiation were created.

The first lenses for radiation control (including divergent radiationfocusing, parallel beam of divergent radiation, a parallel radiationfocusing or other transformation) comprised a package of channels forradiation transportation, and in these channels the radiationexperiences multiple total external reflections. Such lenses were madeof mass of capillaries or polycapillaries, which pass through holes orcells of supporting systems, positioned on definite distances along thelens such as disclosed in U.S. Pat. No. 5,192,869. A lens is shaped likea barrel (i.e. it narrows down to both ends), if it is meant for adivergent radiation focusing; or a lens is shaped like a half-barrel(i.e. it narrows down to one end), if it is meant for transforming adivergent radiation to quasi-parallel radiation focusing. Later on theterms “full lens” and “half lens”, respectfully, became widespread todenote lenses of these two types.

Other forms of lenses are possible, different from “classical” barreland half-barrel forms, for example, the lens is bottle shaped as thecurved body with a geneatrix, having a knee, when the channels areparallel in one or two ends. Such lenses can be used as a radiationfilter (for cutting the high-energy part of the source spectrum) fortransforming a section size of an input beam, etc.

The lenses described above, relating to the lenses of the firstgeneration, are handmade and very massive. Such lenses focus X-rays witha quantum energy up to 10 keV, and the focal spot is of order of 0.5 mmin diameter.

A monolithic lens is also known, in which the walls of neighboringchannels contact each other along their full length and the channelsthemselves have variable along a length cross-section as disclosed forexample in U.S. Pat. No. 5,570,408.

By means of these lenses it is possible to focus a radiation with aquantum energy up to 20-25 keV. A cross-section of a transportationchannel is about 10 μm, and sometimes it is possible to obtain thechannels of up to 2-3 μm size. The minimum size of a focal spot is ofthe same order. Nowadays these lenses, called lenses of the secondgeneration, are the most effective X-ray concentrators, when using X-raytubes as the sources. A weakness of monolithic lenses is that it ispractically impossible to create lenses with sufficiently big diameter(2-3 cm and more) with submicron channels.

In international publications WO 96/01991 and WO 96/02058 a full lensand a half-lens are described, which are made as a package ofmicro-lenses, packed very close, each of these lenses is a monolithiclens. Such construction makes possible to obtain accordingly largercross sizes than in a common monolithic lens. When an apertureincreases, an acceptance angle of radiation of a point source increasesas well. However, the cross section sizes of channels for radiationtransportation and the sizes of the focal spot remain the same, as in acommon monolithic lens, and the packing of micro-lenses for neededshaping of the lens must be hand-made.

The technical result, achievable with the suggested lens, implies thatthe degree of radiation focusing increases owing to decreasing of crosssection of the channels, making possible to use the particles of higherenergy, as well as simplifying the technology of producing owing toeliminating the necessity of individual adjustment of micro lenses, whenpacking them in a unified structure.

The suggested method has an analogue; it is the method according to U.S.Pat. No. 5,812,631. According to this method several (two or more)stages of drawing of stocks is realized (the stocks represent a packageof stocks in a common envelope, obtained at the previous stage). Theregime of drawing the product, which is starting material for producinga lens by cutting the section of this product, from the furnace makespossible in this method to produce a microlens at once. To produce afull lens the product must be drawn repeatedly from the furnace, andthis product must be fed in the furnace by the other end. It complicatesthe technological process.

However, the other defect of this method is more important. It does notprovide the pressure correlation, mentioned above, in capillaries andspace between stocks. If this condition is not met thin-walledcapillaries, which are usually used for producing lenses for theexamined purpose, are compressed in the process of drawing (i.e. it isimpossible to produce the lens suitable for use). Thus the methodaccording to the U.S. Pat. No. 5,812,631 can be realized (i.e. it allowsproducing fundamentally efficient lenses) only with the use ofcapillaries, produced of thick-walled tubes (i.e. a channel diameter ofsuch tube must be comparable with a wall thickness). The same proportionlasts in a ready lens; because of this it has low transparency. Forexample, if a diameter of a channel is approximately equal to a wallthickness, a transparency lowers by an order. It lowers additionally,because this known method provides producing only such lenses, in whichinner envelopes are present, as this method does not include theoperation of envelopes removing from the stock surface.

Analytical devices are among one of the applications of X-ray lenses.These devices are meant for structure analysis (density distribution) ofobjects (including medicine and other biological objects), and foranalysis of elemental composition of products and materials. The use ofradiation for these aims, namely X-rays, is known for a long time.

A quality new stage in progress of such devices began with the use oflenses for controlling radiation, used in such devices such as describedin U.S. Pat. No. 5,497,008. This analytical device includes a radiationsource, representing a neutral or charged particle radiation, and ameans for positioning the object under study. This means is positionedso that it is possible to act on it by radiation of the source. Besidethat the analytical device includes one or more radiation detectors (thedetectors are positioned so that it is possible to act on them byradiation, passed through the object under study or excited in it), oneor more lenses for transforming a radiation, representing a neutral orcharged particle flux, and being positioned on the radiation path fromthe source to the object under study and/or on the path from the objectunder study to one or more said radiation detectors (the detectorsinclude radiation transporting channels, adjoining by the walls, withtotal external reflection).

Thus known analytical device under U.S. Pat. No. 5,497,008 does notprovide high energy, and also cannot create small focal spots, whatlimits an accuracy and resolution of the analysis.

A technical effect, achievable in the suggested analytical device, isthe increase of precision and resolution of the analysis, and also theexpansion of opportunities of the analysis at the expense of applicationof radiation with higher energies, that becomes possible due toadvantages of an offered integral lens.

The devices for radiation therapy, including one or more radiationsources, representing neutral or charged particle flux (namely, X-rays,proton flux), an optical system for beam collimation of every source,and a device for positioning the patient's body or its part to beirradiated, are known. When such a device, healthy tissues, being on aradiation path to a tumor, located deep, are irradiated intensively.

The suggested invention, relating to the device of radiation therapy, isaimed at obtaining the following technical result: a doze ofirradiation, acting on the tissues around the tumor, decreases.

One more field of application of X-ray lenses is microelectronics,namely X-ray lithography.

The device is known for contact X-ray lithography, containing a sourceof soft X-rays, a lens for transforming a divergent radiation toquasi-parallel, including radiation transporting channels, adjoining bytheir walls, with total external reflection, and the means for placing amask and substrate with the resist put on it ( see, U.S. Pat. No.5,175,755).

In this patent the lenses of the first and second generation aresuggested for usage in the lithography. However, any of these types oflenses does not provide the solving a problem of lithography inmicroelectronics. In assembled lenses (lenses of the first generation),in monolithic lenses (lenses of the second generation) the size of thechannel on an input about 1 μm and on an output about 0.1 μm istechnologically impossible to implement at the target aperture 10 cm²and more, what is necessary for lithography in the microelectronics.

The technical result of the suggested invention, related to the devicefor contact lithography, is obtaining a means, suitable for use in themicroelectronics.

It is also known from U.S. Pat. No. 5,175,755 a device for projectionX-ray lithography. This device includes a source of soft X-rays, a lensfor transforming a divergent radiation of the source to quasi-parallel,meant for the irradiation of the mask, a device for the maskpositioning, a lens for X-ray image of the mask transmission with thedecrease of its size to the resist, a means for placing the substratewith the resist put on it. In this case both said lenses include theradiation transporting channels, adjoining by their walls, with totalexternal reflection.

This device, at use in it the lenses of the first and second generations(i.e. assembled and monolithic lenses), known at the moment, as well asthe device for contact lithography, discussed above, are unsuitable foruse in microelectronics in view of impossibility to gain in such lensesdiameters of channels, providing required accuracy of presentation ofthe mask image on the resist.

The technical result of the invention, related to the device for theprojection lithography, is the production of the device, suitable foruse in the microelectronics.

SUMMARY OF THE INVENTION

The present invention is directed to a radiation lens made up of aplurality of sub-lenes. In particular, a bundle of capillaries capableof guiding x-rays or similar neutral or charged radiation are drawn(pulled) together in a gaseous atmosphere at a heat sufficient to softenand bond the capillaries to form a unified sub-lens. The pressure of thegas atmosphere outside of the capillaries is made less than the pressureinside the capillaries to prevent the capillaries from collapsing.Thereafter, a bundle of sub-lenses are similarly drawn together in thegaseous atmosphere and at a heat sufficient to soften and bond thesub-lenses together to form higher integration sub-lenses. This processis repeated, each time drawing together the previous integration levelsub-lenses to form higher integration level lenses until a singleunified lens is formed of the desired size. The ends of the capillariesare cut to form an input face of the lens and an output face of thelens. Capillaries at the input and/or output faces can be orientedtoward a focal point for divergent radiation applications or oriented inparallel for quasi-parallel radiation applications.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, aspects and advantages will be betterunderstood from the following detailed description of a preferredembodiment of the invention with reference to the drawings, in which:

FIGS. 1, 8, and 9 depict the schematic pictures of a full lens, ahalf-lens and a lens, made as an axis-symmetric body with the geneatrix,having a knee, respectively;

FIG. 2 depicts the process of multiple radiation reflection at itsdistribution along the channel of transportation;

FIG. 3 depicts forming of a focal spot;

FIGS. 4 and 5 depict the process of multiple radiation reflection at itsdistribution along the channel of transportation and forming of a focalspot, when the effect of “pressing” of the radiation to the exteriorside of the wall of the channel takes place;

FIG. 6 depicts the full lens, the central part of which does not containthe radiation transporting channels;

FIG. 7 depicts the full lens with unequal radiuses of curvature ofchannels from the input and output sides;

FIG. 10 depicts the schematic picture of the cross-section of thesuggested lens;

FIG. 11 depicts the schematic picture of one of sublenses;

FIG. 12 depicts the scheme of embodying of the drawing operation, whenthe stocks are produced in the suggested method;

FIG. 13 depicts the scheme of performance of the operation of drawingand forming at the last stage of realizing of the suggested method;

FIG. 14 depicts the schematic picture of the product, which is growingout of drawing and forming at the last stage of the suggested methodwith the instruction of cut-sections arrangement for obtaining thedifferent types of lenses;

FIGS. 15-24 depict various variants of the geometry of arrangement ofthe components of the suggested analytical device, used mainly intechnical purposes;

FIG. 25 depicts the usage of the integral lens in the analytical device,intended for medical diagnostics;

FIG. 26 depicts the usage of the integral lens in the analytical device,used in computational scanning tomography;

FIGS. 27 and 28 depict the usage of the integral lens in radiotherapy;and

FIGS. 29 and 30 depict the geometry of arrangement the components of thesuggested devices for contact and projection lithography.

DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT OF THE INVENTION

To gain the technical result, mentioned above, proper in the suggestedlens for radiation transforming, representing the neutral or chargedparticle flux, this lens contains the radiation transporting channels,adjoining by the walls, with total external reflection, oriented byinput ends so that to capture a radiation of the source in use.

Unlike known lenses, the lens according to the present invention is madeas a package of sublenses of various degree of integration. As thistakes place, a sublens of the least degree of integration represents apackage of radiation transporting channels, which is growing out of thejoint drawing and forming of capillaries, packed in the beam, at thepressure of gaseous medium in the space between them less than thepressure inside channels of capillaries, and the temperature ofsoftening of the material and splicing the walls of the adjoiningcapillaries. A sublens of every higher degree of integration representsa package of sublenses of the previous degree of integration, growingout of their joint drawing and forming at the pressure of the gaseousmedium in the space between them less than the pressure inside thechannels of sublenses, and the temperature of softening of the materialand splicing the adjoining sublenses. The ends of this unified structureare cut and form an input and output ends of the lens.

The unified structure and the lenses of each degree of integration canhave an envelope, made of the same material, as capillaries, or veryclose to it on value of the coefficient of thermal expansion.

The envelopes increase the rigidity of the structure and the lensstrength. However, a lens, in which the sublenses do not have envelopes,is more transparent.

The inventive lens is named an integral lens because of combination agreat amount radiation transporting channels (10⁶ and more) in it(therefore with reference to sublenses the concept of a degree ofintegration is used), has channels with smaller cross-section, than theprior art monolithic lens, or miniature lenses, as the channels diameterdiminishes on the every stage of drawing. Correspondingly the degree ofradiation focusing increases, i.e. a size of the focal spot decreases.

All sublenses of the highest degree of integration can be packed in acommon envelope. The latter in this case is an external envelope of alens.

In some applications a presence of coating of one or more layers, madeof one and the same or different chemical elements, on the inner side ofwalls of the channels is useful. Before producing an integral lens thecoatings are applied on the inner side of a tube, the capillaries areresulting from. Thus it is important, that the coefficient of heatexpansion of the material, coatings are made of, should be close to thecoefficient of heat expansion of the material, the capillaries areproduced from. In this case the process proceeds without complications.Multilayer periodical coatings allow to implement advantages, caused byinterference phenomena, incipient at reflection from the surfaces,having such coatings. In particular, radiation monochromation,transported through the channels with the walls, having such coatings,is possible. The application of rough coating gives an appearance ofdiffusion component at reflection and can develops the conditions forradiation transporting at the angle of incidence, exceeding the criticalangle of the total external reflection.

The full integral lens, as well as known lenses of the previousgenerations, is made with a capability of a divergent radiationfocusing; for this purpose input and output ends of the radiationtransporting channels are oriented, accordingly, to the first and secondfocal points. In first of them the radiation source is placed, whenusing the lens; in the second point the focal spot of the lens isforming.

An integral half-lens is used for transforming the divergent radiationto quasi-parallel, as well as at use of lenses of previous generations.In an integral half-lens some ends are oriented to the first focal spot,and other ends are parallel to each other.

It is not always appropriate to make full integral lenses for thedivergent radiation focusing symmetrical. If a size of an X-ray sourceis large enough, it is worthwhile to make the focal distance from theinput end of the lens large, and the focal distance from the output endof the lens lesser in order to obtain small focal spot. For this purposethe radius of curvature of channels of a half of lens, adjoining to aninput end, must be larger, than the radius of curvature of channels of ahalf of lens, adjoining to the output end, i.e. the lens must beasymmetrical with respect to the cross-section medial on its length.

An integral lens can be made as an axi-symmetric body, as well, with thegeneratrix, having a knee, and different diameters on the part of aninput and output, in particular for changing the size of cross sectionof the transported beam. In this case the lens is “bottle” shaped.

It is a traditional demand in the process of creating lenses: alltransporting channels of lenses must be filled with radiationcompletely. For this purpose it is necessary that the filling factorγ=R(θc)²/2d was more or equal to 1 (here R is the radius of curvature ofthe channel, d is the diameter of the channel, θc is the critical angleof total external reflection).

However, the executing of this requirement is not always appropriate. Ina case, when γ≧1, the size of the focal spot of the lens is equal tod+2f_(output) θc where f_(output) is the size of the focal spot of thelens on the part of an output. It means that it is impossible to makethe size of the focal spot of the lens less than d. If γ≧1 fails, thatwill take place only partial filling of the channels with a radiation.Thus X-ray photons or neutrons “force” against the side of walls oftransporting channels, peripheral with respect to an optical axis of thelens. If the factor γ<<1 takes place, the effective size of the channelscan be much less, than the size of channels d. Thus the totaltransmission of the lens decreases. But the size of the focal spotdecreases proportionally also, and the area of the focal spot decreaseseven more sharply, due to what radiation density in the focal spotgrows.

Lenses of viewed purpose have aberrations, consisting that the positionof the focal spot in lengthwise direction is rather spread. Thecharacteristic size of spreading, as a rule, exceeds in tens and moretimes the size of the focal spot in the crosswise direction. Theradiation transporting channels, adjoining to the optical axis of thelens, give the very major contribution to the spreading. Theparticipation of these channels in the forming of the focal spot givesas well a magnification of the crosswise sizes of the spot, as thesechannels have less curvature (down to zero), and it is impossible toexecute the requirement γ<<1, and even γ<1 for them.

In one of special cases of embodiment of the suggested lens it ispossible to except the influence of these channels on the spreading ofthe focal spot in lengthwise direction and magnification of itscrosswise sizes by closing the part of lens, adjoining to the opticalaxis, on the part of the input or output by screens, or by making thispart impermeable for the radiation by the other method. For example, itwould be possible to make continuous (without channels) that part of thelens, where sublenses could be, and for their channels γ≧1.

The specific of the other special cases of embodiment of the suggestedlens is that the channels of one or more sublenses, placed near thelengthwise axis of the lens, are made with a capability of radiationtransporting at a single total external reflection or without it. Forthis purpose they can be made, for example, of smaller length, than thechannels of sublenses, which are more distanced from the lengthwise axisof the lens. Owing to this fact, losses of a radiation in the channelsof the sublenses reduce, and the overall transmission coefficient of thelens increases. The same result is obtained (but in combination with theincrease of spreading of the focal spot) when the central channels aremade of a major diameter.

The operations, being carried out on the different stages of thetechnological process of producing of the suggested integral lens, areof the same tape and do not depend on the degree of integration of thesublenses, used at every stage. The most suitable material for producingintegral lenses is glass; it is possible to use other materials, forexample, ceramics, metals, alloys.

The suggested method of producing the integral lenses, includes two ormore stages of embodiment of stocks, placed in a tubular envelope. Thusthe capillaries are used at the first stage as stocks, and at every nextstage the stocks, which are growing out of the realization of theprevious stage, are used.

As against the previous one, in the suggested method the tubularenvelope with the stocks, filling it, is drawn in the furnace. Thus thefeed speed must be kept lower, than the product withdrawal speed, at theconstant relation between these speeds. After that the stocks, resultingfrom this stage, are gained by cutting lengthwise the product, emergingfrom the oven.

After completion of the last stage, the tubular envelope is filled withthe stocks, which are growing out of this stage. Then the tubularenvelope with the stocks, filling it, is drawn in the furnace, keepingthe feed speed in the furnace lower, than the product withdrawal speedfrom the furnace, changing periodically the relation between these twospeeds to form barrel-shaped thickenings on the finite product. Then thelenses, in the form of parts of the product, are made by cuttinglengthwise the finite product. Each lens has only one barrel-shapedthickening.

At all stages of realization of the method the tubular envelopes areused. These envelopes are made of the same material as the capillaries,or very close to this material on the thermal expansion coefficient. Theprocess of drawing of tubular envelopes with stocks, filling theenvelopes, is realized at the pressure of the gaseous medium in thespace between the stocks less than the pressure inside the channels ofthe stocks, and the temperature of softening of the material andsplicing the walls of the neighboring channels.

In dependence of how the cutting is made (in sections disposedsymmetrically or asymmetrically on each end of a maximum of thebarrel-shaped thickenings, or in section relevant to a maximum ofthickening and on each end of it), symmetrical or asymmetrical full orhalf-lenses are made.

The regime of drawing speed (relation between the feed speed of thetubular envelope with the stocks in the furnace and the productwithdrawal speed from the furnace) defines the lens form. In particular,when this relation (in the process of barrel-shaped thickening forming)changes, the lens with various curvature radius of the channels ondifferent sides of the maximum of barrel-shaped thickening is produced.

The lens as an axi-symmetric body with generatrix, having a knee, andthe ends of the channels, being parallel to the lengthwise axis of thelens (a “bottle” shaped lens) is produced by cutting the part of theproduct, outgoing from the furnace. This part of the product is enclosedbetween the maximum of the barrel-shaped swelling and the cross-section,being on the other side of the inflection point of the generatrix on thepart of the product, where its diameter is constant.

To produce lenses without envelopes, which cover sublenses, each stageof producing the stocks should be finished with etching the envelopes.Similarly, if it is necessary to produce lenses without externalenvelope, it should be etched.

The suggested analytical device, as well as the known one, more close toit, includes a radiation source (representing neutral or chargedparticle beam), a means for positioning the subject under study (themeans is placed with a capability of a radiation of the source acting onthe subject under study), one or more radiation detectors (placed with acapability of a radiation passed through the object under study orexcited in it acts on the detectors), one or more lenses fortransforming a radiation of the source or radiation, excited in theobject under study. These lenses are placed on the radiation way fromthe source to the object under study and/or on the way from the last oneto one or more said radiation detectors. These detectors contain theradiation transporting channels, adjoining by their walls, with totalexternal reflection, and the channels are oriented with their input endsso as to capture the radiation, being transported.

As against known, at least one of the lenses is made as a package ofsublenses of a various degree of integration. Thus the sublens of theleast degree of integration represents a package of radiationtransporting channels, which is growing out of joint drawing and formingthe capillaries bundle at the pressure of the gaseous medium in thespace between the capillaries, being less than pressure inside thechannels of capillaries, and at the temperature of a softening of thematerial and splicing the walls of the neighboring capillaries. Thesublens of each higher degree of integration represents a package ofsublenses of the previous degree of integration, which is growing out oftheir joint drawing and forming at the pressure of the gaseous medium inthe space between the sublenses, being less than pressure inside thechannels of sublenses, and at the temperature of a softening of thematerial and splicing the walls of neighboring sublenses. All sublensesof the highest degree of integration are combined in a unifiedstructure, which is growing out of their joint drawing and forming atthe pressure of the gaseous medium in the space between the sublenses,being less than the pressure inside the channels of sublenses, and atthe temperature of a softening of the material and splicing theneighboring sublenses. The ends of the unified structure are cut, andthey form the input and output ends of the lens.

A lot of characteristic geometries of the integral lenses placing in theanalytical device together with some other constructive peculiarities ofthe device.

So, an analytical device can be made with a capability of scanning thesurface or volume of the object under study by means of the alignedfocuses of the lenses, placed on the way from the source to the objectunder study and from the last one to the detector. At such geometrythree-dimensional local analysis can take place, if the object isscanned in three dimensions. The sensitivity of the method is highenough, as the detector receives the radiation significantly from thearea, where both lenses have common focus.

In this geometry a specific case can take place, when an integral lens,placed on the radiation way from the object under study to the detector,forms a quasi-parallel beam, and between the lens and the detector acrystal-monochromator or multilayer diffraction structure are placedwith a capability of varying their placement and the angle of incidenceof the quasi-parallel beam on them to fulfill the Bragg condition fordifferent lengths of radiation waves, excited in the object under study.The usage of the lens significantly decreases the losses in comparisonwith the collimation method of producing of a parallel beam, falling onthe monochromator.

In the other geometry synchrotron or other source is used as the source,forming a parallel beam, and a lens, placed on the radiation way fromthe source to the object under study, is made with a capability of suchbeam focusing.

One more geometry is characterized by the fact, that a source of abroadband X-rays is used in an analytical device. The X-rays istransported simultaneously by two lenses, made with a capability offorming a quasi-parallel beam. Two crystal-monochromators are placedbetween an output of each of the lenses and the means for positioningthe object under study. Thus one of the crystals is placed withcapability of selecting a radiation, having a wavelength lower, and theother crystal is placed with a capability of selecting a radiation,having a wavelength higher, than the absorption line of the element,which presence is checked in the object under study. The devicecomprises two detectors, each of them being placed after the means forpositioning of the object under study so that to receive the radiation,passed through the object under study, and formed by one ofcrystal-monochromators. The difference of the output signals of thedetectors is proportional to the concentration of the element underchecking.

Two other geometries, described below, have similar coefficients. In oneof them an analytical device includes, besides the source, one moreX-ray sources. Thus the radiation of one source has a wavelength lower,and the other one higher, than the absorption line of the element, whichpresence is checked in the object under study. Only one lens, which canform a quasi-parallel beam, is placed between each source and a meansfor positioning the object under study. The device includes twodetectors, each of them is placed after the means for positioning theobject under study so that to receive the radiation, passed through theobject under study from only one source. The difference of the outputsignals of the detectors, as in the previous case, is proportional tothe concentration of the element under checking.

In the other geometry the source is made as an X-ray source with ananode with a capability of receiving the radiation with twocharacteristic wavelengths—lower and higher than the absorption line ofthe element, which presence is checked in the object under study. Onelens is placed between the source and the means for positioning theobject under study. The lens is made with a capability of forming aquasi-parallel beam. A rotating screen with cycling windows, closed byfilters, is placed in front of or behind the lens; these windows aretransparent for one and opaque for the other said wavelength. Thedifference of output signals of the detectors, conforming twoneighboring windows, is proportional to the concentration of the elementunder checking.

One more type of geometry is characterized by usage of the radiation ofthe secondary target, placed behind the lens on the radiation way fromthe source to the object under study. Thus the lens is made with acapability of focusing the source radiation on the secondary target. Itallows to irradiate the object under study by a monochromatic radiationof the secondary target, what increases the sensitivity of analysis incases, when the elements, being checked for presence in the object, haveabsorption lines, close to the radiation line of the secondary target.The presence of the lens, which concentrates the source radiation on thetarget, makes possible to compensate the disadvantage of this method(the disadvantage is caused by low intensity of the secondaryradiation).

The sensitivity of the method increases in addition in the geometry withthe secondary target, which is characterized by the presence of thesecond lens between the secondary target and the means for positioningthe object under study.

The advantages of usage the polarized radiation for irradiation of theobject under study, in this case, are the same as in the geometry,described below. In this geometry a lens and a crystal-monochromator, ora multi-layer diffraction structure are placed in succession on theradiation way from the source to the object under study. Thus the lensis made and oriented with a capability of forming a quasi-parallel beam,falling at an angle of 45° on the crystal-monochromator or themulti-layer diffraction structure for forming the polarized radiation bythem, and the detector is placed at an angle of 90° to the direction ofpropagation of the polarized radiation. In this geometry, owing to thepolarized selection, the background, caused by the Compton scatteredradiation drops out.

The next geometry realizes the method of a phase contrast. In thisgeometry a lens and a crystal-monochromator are placed in succession onthe radiation away from the source to the object under study in theanalytical device. Thus the lens is made and oriented with a capabilityof forming a quasi-parallel beam, falling on the crystal-monochromatorat the Bragg angle. The crystal is placed in parallel or with slightdeflection on the radiation away from the object under study to thedetector. It provides a capability of fixing the phase contrast of areasof the object under study by means of the detector (the areas havedifferent densities and cause different refraction of the radiation,falling on them).

The geometry, typical for medical applications, provides the usage of anX-ray source and embodiment of the means for positioning the objectunder study with a capability of examining the parts or the organs of ahuman body.

In particular, when using the analytical device for mammographypurposes, an X-ray source has a molybdenum (Mo) anode, and the means forpositioning the object under study is made to provide a capability ofexamining the mammary gland.

Thus the integral lens is placed on the radiation away from an X-raysource with the molybdenum anode to the object under study, the lens ismade with a capability of forming a quasi-parallel beam with thecross-section, being enough for simultaneous action on the whole areaunder study; and the detector is placed to provide the distance, notless than 30 cm, between it and the object under study. The usage of theparallel beam and the choice of the distance provide fine contrast of agained image without usage of the special means for decreasing theinfluence of the scattered radiation, excited in the object under study.

One more possible field of application of the suggested analyticaldevice in medical diagnostics is computer tomography.

In the described geometry, providing the usage of an X-ray source andthe embodiment of the means for positioning the object under study witha capability of examining the parts or organs of a human body, it isstipulated the opportunity of rotational movement rather each other ofthe means for positioning, from one hand, the lens, placed between themeans and the means for positioning the object under study, from theother hand, and the detector, which output is connected to computermeans for processing the results of detection. Thus the integral lens ismade with a capability of focusing the radiation, formed by the source,inside the object under study. The focusing point here represents avirtual radiation source, placed inside the object under study, thatcauses the principal difference from a common scanning computertomograph, in which the detector absorbs the radiation, passed throughthe object under study from the source, placed outside the object understudy. Due to this the procedure of an image formation of small areas ofthe object under study can be simplified.

In the suggested invention, related to the device for radiotherapy, theirradiation doze on the tissues, surrounding the tumor, can be decreasedby means of focusing the radiation on the tumor, due to what theradiation concentration in healthy tissues, namely on the patient'sskin, considerably decreases at the same doze of irradiation on thetumor.

To obtain the result the suggested device, as well as the known one,includes one or more radiation sources, representing the neutral orcharged particle flux, as well as the means for positioning thepatient's body or its part for irradiation.

As against the known one, the suggested device for radiotherapy includesthe lens, placed between each of the sources and the means forpositioning, for radiation focusing on the patient's tumor. The lensincludes the radiation transporting channels, adjoining by their walls,with total external reflection; the channels are oriented by their inputends with a capability of capturing the transported radiation. The givenlens is made as a package of sublenses of different degree ofintegration. Thus the sublens of the least degree of integration is madeas a package of channels for transporting the radiation, which isgrowing out of the joint drawing and forming of channels bundle at thepressure of the gaseous medium in the space between the channels, beingless than the pressure inside the channel of the capillaries, and at thetemperature of a softening of the material and splicing the neighboringcapillaries. Each sublens of the higher degree of integration is made asa package of sublenses of the previous degree of integration, which isgrowing out of their joint drawing and forming at the pressure of thegaseous medium in the space between the of sublenses, being less thanthe pressure inside the channels of sublenses, and at the temperature ofa softening of the material and splicing the neighboring sublenses. Allsublenses of the highest degree of integration are combined in a unifiedstructure, growing out of their joint drawing (i.e., pulling orstretching) and forming at the pressure of the gaseous medium in thespace between the sublenses, being less than the pressure inside thechannels of sublenses, and at the temperature of a softening of thematerial and splicing the neighboring sublenses. The ends of the unifiedstructure are cut and form an input and output ends of the lens.

A nuclear reactor or accelerator may be used as the sources.Quasi-parallel beams of thermal or epithermal neutrons are formed on theoutputs of the said nuclear reactor or accelerator.

Thus the used integral lens can contain the curved longitudinal axis forthe neutron beam turning.

As it was already mentioned at discussion above, neither with theassembled lenses (lenses of the first generation), nor with themonolithic lenses (lenses of the second generation) it is impossible torealize the channel size of about 1 μm on the input and of about 0.1 μmon the output at the exit aperture of 10 cm² and more, what is necessaryfor lithography in microelectronics. The parameters can be realized withan integral lens.

The suggested device for contact X-ray lithography contains the softX-rays source, the lens for transformation the divergent radiation ofthe source to quasi-parallel (this lens contains the radiationtransporting channels, adjoining by their walls, with total externalreflection), and the means for positioning the mask and the substratewith the resist, applied on it.

As against the known one, the lens of the suggested device is made as apackage of sublenses of different degrees of integration. Thus the lensof the least degree of integration represents a package of radiationtransporting channels, which is formed by joint drawing the bundle ofcapillaries at the pressure of the gaseous medium in the space betweenthe channels of capillaries, being less than the pressure inside thechannels of capillaries, and at the temperature of softening of thematerial and splicing the neighboring capillaries. The sublens of eachhigher degree of integration is made as a package of sublenses of theprevious degree of integration, which is growing out of their jointdrawing and forming of at the pressure of the gaseous medium in thespace between the sublenses, being less than the pressure inside thechannels of the sublenses, and at the temperature of softening amaterial and splicing of the neighboring sublenses. All sublenses of thehighest degree of integration are combined in an unified structure,which is growing out of their joint drawing and forming at pressure ofthe gaseous medium in the space between the sublenses, being less thanthe pressure inside the channels of sublenses, and at the temperature ofsoftening a material and splicing the neighboring sublenses. The ends ofthe unified structure are cut and form the input and output ends of thelens.

It is possible to increase the accuracy of mask imaging on the resist upto the level, being enough for projection lithography inmicroelectronics owing to the usage of the suggested integral lenses inthe device.

The suggested device for projection X-ray lithography, as well as theknown one, contains the soft X-ray source, the lens for transforming thedivergent radiation of the source to quasi-parallel, intended forirradiating the mask, the means for mask positioning, the lens for X-rayimage transmission of the mask on the resist with diminution of theimage size, the means for placing the substrate with the resist, appliedon it. Thus both said lenses contain the radiation transportingchannels, adjoining by their walls, with total external reflection.

As against the known device, at least second of the lenses in thesuggested device for the projection lithography is made as a package ofsublenses of various degree of integration. Thus the sublens of theleast degree of integration is made as a package of radiationtransporting channels, which is growing out of the joint drawing andforming of the bundle of capillaries at the pressure of the gaseousmedium in the space between them, being less than the pressure insidethe channels of the capillaries, and at the temperature of a softeningof the material and splicing the neighboring capillaries. The sublens ofeach higher degree of integration is made as a package of sublenses ofthe previous degree of integration, which is growing out of their jointdrawing and forming at the pressure of the gaseous medium in the spacebetween them, being less than the pressure inside the channels ofsublenses, and at the temperature of a softening of the material andsplicing the neighboring sublenses. All sublenses of the highest degreeof integration are combined in a unified structure, which is growing outof their joint drawing and forming at the pressure of the gaseous mediumin the space between them, being less than the pressure inside thechannels of sublenses, and at the temperature of a softening of thematerial and splicing of the neighboring sublenses. The ends of theunified structure are cut and form the input and output ends of thelens.

To decrease the image size, transmitted on the resist, the second of thelenses, used in the device, is made as an axi-symmetric body with ageneatrix, having a knee, and with the input and output ends ofchannels, being parallel to the longitudinal axis of the lens, and theinput diameter of the lens is smaller than the output one. The samerelation takes place between the diameters of separate channels forradiation transportation on the input and output of the lens.

The relation of the diameters, which must be considerably more than 1,determines a degree of diminution of the mask image at its transmissionon the resist, and, therefore, the degree of miniaturization of theproducts of microelectronics.

Referring to FIG. 1, the full integral lens 1 has an input 2 and output3 focuses, placed on its optical axis 4 in the point of the intersectionof the continuations of the axial lines of the radiation transportingchannels. FIG. 2 depicts one of these channels. A particle, captured bythe input end of the channel, moves in the channels along the trajectory6, being reflected from the walls 7 of the channel at angles, less thanthe critical value θc of the angle of the total external reflection. θcis of several mrad. The cross-section of the channels is of micronfractions size order, and their quantity, as it was mentioned, is about1 million. Therefore the given images are conditional and the scale ofthe figures is far from the real one.

FIG. 3, illustrating the forming of the focal spot by the radiation,exited from the channels 5, depicts the focal spot, which is spread inthe lengthwise direction and can have the size 9, considerably exceedingthe size 8 in the cross direction. This phenomenon refers to one of thetypes of aberrations in the optical systems. To decrease this aberrationit can be recommended to follow not the traditional requirement offilling the whole cross-section of the transporting channel with theradiation (γ≧1), but visa versa (γ<1), or even (γ<<1), when producingthe integral lens. In this case FIG. 4 depicts the character oftrajectory 6 of the particle, captured by the channel. Thus theradiation is reflected each time from one and the same wall 7 of thechannel 5, and the radiation, as though, “presses” to the wall, fillinga small part of the cross-section of the channel. As a result the sizeof the focal spot is determined by the size of this part of thecross-section of the channel, and the same effect is achieved, as wellas at diminution of the section. As to decrease the degree of fillingthe cross-section of the channel by radiation, with other conditionsbeing equal, it is necessary to decrease the radius of channelscurvature, the continuation of the output ends of the channels convergein the focus area at major angels. Owing to this fact the spread of thefocal spot in the lengthwise direction decreases, that promoteseliminating the aberration mentioned above. FIG. 5 depicts the describedphenomena, where the parts 10, participating in radiation transporting,of the channels 5 are black colored. It is visible, that the sizes ofthe focal spot 11 are smaller in both directions, than on the FIG. 3.

It can be impossible to follow the requirement (γ<<1) or (γ<1) for thecentral channels (adjoining the optical axis of the lens), havingsmaller curvature than peripheral ones. The central part of the lens canbe made without the radiation transporting channels (see FIG. 6, wherethe continuous central part 12 is shaded) or it can be closed with thescreen from the source side to except the negative influence of thecentral channels.

Each channel of the symmetrical (with respect to the middlecross-section lengthwise the lens) full lens has the constant curvatureradius, the smaller it is (i.e. the channel curvature is larger), themore distanced is the channel from the optical axis 4 of the lens (seeFIGS. 1 and 6). The full lens can be made asymmetrical with respect tothe section, as it is shown in FIG. 7. The curvature of each channel ofthe asymmetrical lens is inconstant along its lengthwise. Thus thecurvature is larger for the ends of all channels, adjacent to one of thefaces, and it is smaller for the opposite ends of the same channels,adjacent to the other face. FIG. 7 depicts the channels, adjoining tothe left face and having smaller curvature (larger radius of curvature).

The center of curvature can occupy different positions (FIG. 7,positions 13 and 14) for different parts of the channels of the ends.

The integral half-lens 14 (FIG. 8a) has only one focus 2 from the sideof the smaller face (left one in FIG. 8a). The ends of the channels,adjoining this face, are oriented toward the focus 2. The ends of thechannels, adjoining the larger face (right one in FIG. 8b), are parallelto the optical axis 4 of the half-lens 14. If the focus 2 is combinedwith the point source, the radiation 15 on the output of the half-lens14 is quasi-parallel. If such radiation 16 is delivered from the majorface (FIG. 8b), the ends of the channels, adjoining the smaller face(right one in FIG. 8b), become output ones. In this case the radiation,yielding from the half-lens 14, concentrates in the focus.

The faces of the full lens 1 and the half-lens 14, facing the focuses,can be made sphere-shaped with the center in the corresponding focus, asit is shown in FIG. 1, FIG. 7 and FIG. 8a, b. In this case equalrequirements of radiation capture of the point source for all channelsare provided.

The bottle-shaped lens 17 (FIG. 9) has the ends of the channels, beingparallel to the optical axis of the lens, from both faces. Such lens hasthe form of an axi-symmetric body with the knee of the generatrix. Theinput quasi-parallel beam 16, falling on the smaller (left one in FIG.9) is transformed by the lens to the output quasi-parallel beam 16′ withthe larger section. The cross-section of the output beam, vice versa,decreases as against the input one, when the input radiation issubmitted to the larger face (right one in FIG. 9). If the input beam isan image carrier, for instance X-ray image, and the distribution of theradiation intensity in the cross-section of the beam is of character,corresponding the image, so the image scale on the output of the lenschanges in appropriate way. The change of the image scale in theintegral lens may be as much as two orders. Thus the small diameter ofthe channels in combination with the absence of the shadowing influenceof the envelopes of sublenses (in case, when the lenses are etched inthe process of their producing) provides the good quality ofreproduction of image details.

FIG. 10 depicts the common picture of the cross-section for all types ofintegral lenses (in view of the note, made above, regarding theconvention and scale of the image). This figure depicts the specificcase, in which the full lens, as a whole, and the sublens as well havethe envelopes. The channels 5 for radiation transporting are inside theenvelope 18 of the sublenses of the least (first) degree of integration.Groups of such sublenses, forming the sublenses of the next (second)degree of integration, are placed in the envelopes 19. The package ofsuch sublenses forms the lens as a whole with the envelope 20.

FIG. 11 depicts the form of one of peripheral sublenses 18, 19 (distantfrom the optical axis of the lens).

It is necessary to pay attention, that the construction of the suggestedintegral lens is not simply the result of assembling in a directsequence of the channels-capillaries in the lenses of the first degreeof integration, first of all, then grouping the last ones in the lensesof the second degree of integration, etc. This construction is connecteddirectly with the suggested method of producing, what explains thepresence of elements of this method in the characteristic of theconstruction. Sublenses of any degree of integration and the integrallens do not appear as they are assembled, they result from therealization of the method as a whole after finalizing the forming, whichseveral stages of drawing precede. Neither the lens as a whole, nor thesublenses, being a part of the lens, are not present before therealizing of forming, there are only stocks with straight channels.“Forming”, being presented in the characteristic of the integral lens asthe feature of the sublenses of different degrees of integration and thelens as a whole, is precisely the above forming, achieved at the finalstage of the method. Only after such forming the parts of the integrallens, called the sublenses of the highest degree of integration, and theparts of these sublenses, called the sublenses of the lower degrees ofintegration, get the features of the lenses. The features differ themfrom the package of parallel channels. At the same time the producedlens can not be disassembled into sublenses and separate channels.Therefore the sublens, shown in FIG. 11, does not exist off the integrallens as a whole (similarly, the separate electronic components can notbe allocated from the integral microchips). The prefix “sub” of the term“sublens” shows that each sublens, not existing independently, carriesout the subordinate role in the composition of the lens as a whole. Thisreason causes the term “a sublens” (but not “a lens”) usage to indicatethe components of the integral lens.

Thus not only plenty of channels in the lens as a whole and in each ofits sublenses, but the circumstances are the basis for the term“integral” usage in the head of the suggested invention, regarding tothe lens, and the concept “the degree (level) of integration” for thesublenses characteristic. Only separate capillaries are integrated(combined) in the sublens of the first degree (level) of integration,the elements, being the lenses themselves in the functional relation(the sublenses of the first, second, etc. degrees of integration), areintegrated in the sublenses of the second degree of integration andhigher.

As it was said above in the characteristic of the suggested invention,relating to the integral lens, the envelopes of the sublenses, whichpresence is determined by the technology of producing, and whicheliminating demands to amplify the method of producing with theoperations of etching of these envelopes, play the positive role, aswell, increasing the structure stiffness. It is necessary to use for theenvelopes the same material, as well as for capillaries, or close to itin value of the thermal expansion coefficient. The removal of theenvelopes makes the technological process more difficult, however theydeteriorate the lens transparence moderately. Their negative influenceon the uniformity of transportation of the radiation intensity along thecross-section of the beam is more essential. Therefore the usage of thelenses free of envelopes, covering the sublenses, is necessary not somuch for increasing the transparence of the lens, as much as foreliminating the cause of nonuniformity of intensity transportation alongthe cross-section of the beam, what can be important in a series ofapplications.

To produce the lenses, described in the suggested method, the tubularenvelope 21 (FIG. 12), for instance glass one, is filled with thestocks, received at the previous stage of the method, and then it isdelivered to the furnace 22 vertically by means of the upper drive 23,and it is drawing from the furnace at a speed, exceeding the feed speed,by means of the bottom drive 24. The product 25 with significantlysmaller diameter than the diameter of the envelope 21 at the entrance ofthe furnace is a result of drawing. The temperature in the furnace mustbe enough to soften the material and splice the neighboring stocks,filling the tubular envelope 21. At the first stage as the stocks, whichthe tubular envelope is filled by, the capillaries are used, inparticular, glass ones, produced from the glass of the same sort, as itwas used for producing the envelope. The glass capillaries can beproduced with the use of the similar technology by means of drawing ofglass tubes with the further cutting them on the capillaries of desiredlength.

In the process of drawing the axisymmetric temperature field should beformed (FIG. 12 depicts the distribution of temperature T along thefurnace height L, having narrow maximum 27). The transition region 26 ofthe initial diameter of the tubular envelope 21, filled with the stocks,in the smaller diameter is placed in the zone of narrow peak 27 of thetemperature distribution along the furnace height.

The pressure between the capillaries should be kept lower than insidethe channels of the stocks to prevent the collapse of the capillaries inthe process of drawing, accompanying by compression of the stocks,placed in the tubular envelope (eventually, it is important to maintainthe higher, than in the space, pressure in the channels of capillariesof the sublenses of the least degree of integration). For this purposethe upper ends of the channels of the stocks should be closed beforeplacing in the envelope (for instance, the upper ends of the stocksshould be spliced), and in the process of drawing the gas should bedrawn off from the upper end of the envelope filled with the stocks (thedraw off is diagrammatically shown in position 28, FIG. 12). It is notnecessary to seal the bottom ends of the channels of the stocks, and theenvelope, filled with the stocks, because the result, close to thesealing, is obtained by essential diminution of the diameter of theproduct, emerging from the furnace, in comparison with the initialdiameter of the envelope with the stocks, delivered to the furnace fromabove.

The product, growing out of the drawing, is cut after cooling, and onegets the stocks for the next stage. The tubular envelope is filled withthe stocks, and the envelope is drawing similarly the previous stage.

Stocks, obtained at every stage, are acid etchable to remove thematerial of the envelopes before the tubular shell is filled with thestocks, if it is necessary to produce the lens with the envelope freesublenses.

The described stages should be realized several times (usually 3-5),after what the final stage should be realized. At this stage (FIG. 13)the drawing of the product from the furnace is slowed down and then isaccelerated again periodically, therefore thickenings 28 are made,connected with tapers 29. The parts of the thickenings, directlyadjoining the maximum, are barrel-shaped. The desired curvature ofbarrel-shaped generatrixes, in which the channels are placed, isobtained by regulation of the variable speed of drawing (i.e. therelation between the speeds of the upper and bottom drives 23, 24), andit is possible to obtain the thickenings, asymmetrical to the maximum aswell. At this stage, as well as at the previous stage of producing thestocks, the closing of upper ends of the channels of the stocks beforeplacing them in the tubular envelope and the drawing off the gas fromthe upper end of the envelope (with the stocks placed in it) is carriedout (the drawing off is not shown in FIG. 13).

The product with periodic thickenings, obtained at the given stage,(FIG. 14) is cut lengthwise to produce the lenses of the desired type.The positions 30, 31, 32 in FIG. 14 depict the parts of the product,which, after being cut, present correspondingly a full lens, a half-lensor a “bottle-shaped” lens.

When using the integral lenses in the analytical devices for flawdetection, elemental analysis, analysis of the internal structure of theobjects, and diagnostics in technology and medicine, huge number ofgeometries of relative position of radiation sources, analysis object,means for radiation detection, lenses, and other elements is possible.Only some of them in combination with some constructive peculiarities ofthe analytical device, associated with corresponding geometries, areconsidered below.

The means for positioning of the object under study (hereinafter it issometimes called a sample) is one of the constructive elements of theanalytical device. As the radiation interacts with the sample byoperation of the analytical device, further as a rule precisely theobject under study (a sample) is mentioned, and not the means forpositioning, though it (and not the sample) is a constructive element ofthe analytical device.

High efficiency of analysis, owing to focusing of the source radiationin one point on the surface of the object under study in combinationwith the radiation capture, scattered by the sample, in some bodilyangle with the following radiation concentration on the detector, isobtained owing to the geometry, showed in FIG. 15. Here the full lenses1 and 1′ have combined focus 34, which can scan the surface or interiorareas of the sample 33. The detector 35 absorbs the radiation, focusedby the second lens 1′. The analysis, using the low-power source 2, canbe realized by means of the lens 1′, focusing the radiation of the pointsource 2 on the object of analysis, and the lens 1.

Similar geometry (without the second lens 1′) is used in energydispersion method, when the semi-conductor detector is used. Thus thelens 1 focuses the radiation on the object (sample), the detector 35 isplaced close to the sample, and the detector registers both afluorescent radiation and a radiation, scattered by the sample. In suchgeometry the integral lens 1 increases the photon flow on the sample,and the detector vicinity to the sample makes it possible to collectmore quantity of photons. The lens 1 removes high-energy photons, whichcreate the high background of the scattered radiation, from the sourcespectrum. The analysis localization is obtained by means of radiationfocusing on the small area of the sample 33.

The important specific case of the embodiment of the analytic device isthe use of X-ray tubes with a through anode. If the lens with very smallfocal distance is used (for instance, the lens, in which, at the factorγ<<1, the effect of “pressing” to the exterior side of the transportingchannels arises), so such lens can be placed closely to the throughanode. Thus the lens can be made small-sized, conserving the widecapture angle simultaneously. Such combination is especially effective(the tube with through anode plus the integral lens), when the anode ismicrofocal (0.1-100 microns). As the solid angle of the radiation of thethrough anode is wide (it is close to a hemisphere), the tube with thethrough anode can be effectively used simultaneously with some lenses,and each lens gathers the radiation from the part of the solid angle.

It is necessary to mention, concerning both the described schemes, andthose, which will be described below, that these schemes contain minimumelements, being enough to realize the analysis by means of the device(i.e. to get some information about the object under study). To providethe receiving the information, handy for immediate use, to improve thereceiving the clear information operatively, etc., the analyticaldevices are supplemented with the means for processing and presentingthe information, which are connected to the detector output. The meansrealize transformation of the output signals of the detector,visualization of the signals synchronously with the mechanical movementsof the elements of the analytical device, etc. The synchronizationdemands the connection of the means for processing and presenting theinformation with the means for realizing the movements. The means forprocessing and presenting the information, used with the analyticaldevices, are known. And their functions and structure do not depend onthe way, which the signals, carrying the information about the objectunder study, were received by. For this reason the detector output isaccepted to view as the output of the analytical device (the detectoroutput is sensitive to the radiation, which is growing out from thesource radiation and the object under study interaction, therefore thedetector output carries the information about the features of the objectunder study).

In the next considered geometry (FIG. 16) a means for monochromating theradiation, excited in the sample 33, is used (crystal-monochromator 36).The radiation is monochromated owing to the conditions of reflecting ofthe parallel beam from the crystal-monochromator are met in the verynarrow interval of particle energies. To form a parallel beam and,simultaneously, to gather a radiation, scattered by the object understudy, the half-lens 14 is used. Its focus is combined with the focus ofthe full lens 1, focusing the radiation of the point source 2 in thepoint 34 of the object under analysis. Varying the particle energy,falling on the detector 35, makes possible to study in more details thefeatures of the sample by means of change of angular position of thecrystal-monochromator, in particular to study the sample on presence ofdefinite chemical elements.

The geometry in FIG. 17 differs from the previous one in that a sourceof quasi-parallel radiation 17 (for example, a synchrotron source) ismeant to be used instead of a point source. The half-lens 14′ focusesthe radiation of this source in the point 34, being at the same time afocus of the half-lens 1, which forms a quasi-parallel beam for themonochromator 36.

A common peculiarity of the following two geometries (FIG. 18 and FIG.19) is the fact, that radiation, passing through the sample, and theradiation, excited in the sample by acting of monochromatic radiationsof two close wavelengths, are studied simultaneously.

In the geometry in FIG. 18 such radiations are obtained from onebroadband point source 2 by means of two crystal-monochromators 36 and36′, irradiating them with parallel beams, formed by half-lenses 14 and14′, which common focus coincides with the source 2. To prevent thedirect hit of the radiation of the source 2 on the sample 33 anabsorbing screen (it is not shown in the drawing) must be set betweenthem. The output signals of the detectors 35 and 35′ differ in thatdegree, in what the reaction of the object under study is different,when the object is irradiated with particle fluxes of different, butclose energies. Difference of these signals gives the information onlyabout such difference. Therefore if one of the energies is higher, andthe other is lower than the absorption line of the element, whichpresence it is necessary to detect in the sample, the sensitivity of thedevice is very high owing to the exclusion of all other factorsinfluence on the difference of output signals of the detectors 35 and35′. The given geometry can by used, for example, in angiography, wheniodine is injected in a patient's blood, and it allows to increment thesensitivity of the method approximately on two orders in comparison withthe case, when the lenses, which form a parallel radiation, falling onthe monochromators, are absent, and the distance between themonochromators and the source must be increased.

In the geometry in FIG. 19, realizing the same principle, two differentpoint sources 2 and 2′ are used to obtain particles with different, butclose energies. The radiation of these sources has clearly definedcharacteristic lines: higher and lower than the absorption line of theelement, to be detected. The radiation of both sources is transformed,by means of the half-lenses 14 and 14′, to quasi-parallel one, actingdirectly on the sample 33.

FIG. 20 depicts one more variant of realizing of the same principle. Inthis geometry radiations with two energies, acting on the sample 33, areformed alternately as a result of radiation transmission of the samesource 2 through the alternating filter-windows of the rotating screen37. These windows alternate in such a way, that they are transparent forone wavelength and opaque for the other wavelength of the radiation,which must act on the object under analysis. The rotating screen 37 withwindows can be placed both after the half-lens 14, which transforms adivergent radiation of the source to quasi-parallel (FIG. 20 depictsthis case), and before the half-lens 14. The difference of the outputsignals of the detector 35, corresponding to two adjacent positions ofthe rotating screen 37, can be used in the same way as in the geometriesin FIG. 18 and FIG. 19.

In the geometry in FIG. 21 the usage of the secondary target 38 isprovided for obtaining a monochromatic radiation with the wavelength,defined by the features of the target. A weakness of the known deviceswith a secondary target is rather low intensity of a secondaryradiation. The influence of the weakness is removed due to the usage ofthe lens 1 in the described geometry. The lens 1 concentrates the sourceradiation on the target in a small area 34 of the focal spot. Theradiation of the secondary target 38 falls on the object under study 33,where fluorescence radiation, which falls on the detector 35, arises.This geometry makes possible to irradiate the object under study withrather intensive monochromatic radiation of the secondary target.

In the geometry in FIG. 22 the sample 35 is irradiated with amonochromatic radiation as well, but in this case thecrystal-monochromator 36 is the radiation source, not the secondarytarget. A parallel beam, required for a monochromatic radiation forming,is formed of the divergent radiation of the broadband source 2 by thehalf-lens 14. A wavelength (particle energy) of the radiation, acting onthe object under study, can be changed by varying an angular position ofthe crystal-monochromator.

In the geometry in FIG. 23 the crystal-monochromator 36, irradiated byan quasi-parallel beam, formed by the half-lens 14, is used as well. Afeature of the crystal-monochromator to form a polarized radiation isused in this geometry. For this purpose the quasi-parallel beam isdirected to the crystal-monochromator 36 at θ=45° angle. A diffractedradiation from the crystal-monochromator 36 falls on the sample understudy 33, and the radiation from the sample under study 33 falls on thedetector 35, positioned at a 90° angle to the direction of propagationof the polarized radiation of the crystal-monochromator 36. Due to thispolarized selection takes place, and the detector 35 is free of thebackground influence, produced by the divergent Compton radiation,arising in the sample under study when the radiation from thecrystal-monochromator 36 acts on it.

In this geometry a target made of light metal (for example, beryllium(Be)) can be used instead of the crystal-monochromator.

The geometry in FIG. 24 is used to realize the method of a phasecontrast. In this method a sample is irradiated with a monochromaticradiation, formed by the first crystal-monochromator 36, and a parallelbeam for this purpose is formed of the divergent radiation of the source2 by the half-lens 14. The radiation falls on the crystal-monochromator36 at a Bragg angle θ_(Br). The second crystal-monochromator 36′,identical to the first one, is positioned after the sample with acapability of varying its angular position in small limits with respectto the position, parallel to the first one. When there are someirregularities in the sample, which differ in density from theneighboring areas, a radiation refracts in such irregularities, passingthrough them, differently than in the neighboring areas. It can be fixedwhen a signal appears on the output of the detector 35 at a definiteposition of the second crystal-monochromator. The sensitivity of themethod of the phase contrast is much higher in comparison with theimmediate fixation of differences of planes (for example, differences ofradiation intensities, passed through the neighboring areas of theobject with different, but close densities). The usage of lenses makespossible, without increasing the source power, to work at increasedmagnitude of intensity of the quasi-parallel radiation, falling on thecrystal-monochromator, and the radiation, falling on the detector.

It was already mentioned above (see the usage of the analytical devicein angiography) that the analytical device can be used in medicaldiagnostics.

FIG. 25 depicts the usage of an integral half-lens in the analyticaldevice, solving problems of medical diagnostics. The object under study39 (a part or an organ of a human body) is irradiated with aquasi-parallel radiation, formed by the half-lens 14 from the divergentradiation of the source 2, being placed in the focus of this lens. Thedetector 35 receives two-dimensional density distribution of theradiation, passed through the object 39 (this two-dimensional densitydistribution of the radiation is interpreted as density distribution ofthe object in the corresponding projection). A distinction of the givengeometry is that the detector must be placed far enough from the object(for a distance of not less than 30 cm). Due to the fact, that theobject is irradiated with a quasi-parallel beam, the distance of thedetector practically has not an effect for a desired signal level ofdensities distribution of the object. However in this case the influenceof the divergent radiation, arising in the object, sufficientlyattenuates, due to what an image contrast range increases.

In this case an integral lens is made with a capability of forming aradiation field of 20×20 cm² order size. If the detector is placed atthe mentioned distance from the object, so it is no need to use anymeans for suppressing the divergent radiation in this geometry. Thusboth problems are solved: spatial resolution and doze problems. Let, forexample, the detector is at the distance of 50 cm from the object. Ifthe resolution is equal to 10⁻⁴×50=50×10−3 cm =50 μm the beam divergencewill be equal to 10⁻⁴ rad. At the same time an omnidirectionalradiation, diverged in the object, reaches the detector with significant(in more than 30 times) attenuation at the distance of 50 cm from theobject. Therefore it is possible to do without antiscattering rasters,which usage in order to increase the image contrast range mates with theincrease of the radiation dose.

Use of integral lenses makes possible to solve the problems of earlydiagnostics of oncologic diseases due to the obtainable resolution of50-100 μm order. It is appropriate to use an X-ray tube with amolybdenum (Mo) anode (E=17.5 keV) as a source in mammographyresearches.

Scanning computer tomography is one more promising field of usage ofanalytical devices with integral lenses in medicine. Modern tomographesprovides the image of the density distribution of tissues of a humanorganism by registration of the radiation intensity, passed from thesource to the radiation detector. To calculate the density distributionwith the high resolution in one other section it is necessary toirradiate this section many times (usually, more than one hundred) atdifferent angles. Thus the dose is usually high, of 1 R order.

The usage of an integral lens with the high level of the radiationfocusing provides to change the situation efficiently. As it is shown inFIG. 26, a full lens 1 is placed between a source 2 and a patient 39 sothat a second focus is placed inside the area under study. The detector35, as usual, is on the other side of the patient and it is directed tothe radiation yield. The point, the radiation is focused in, acts as avirtual radiation source, placed inside the object under study. Due tothis and small sizes of such source, geometric blurriness of theradiation from the source decreases sufficiently. The blurriness isexpressed by the formula:

U=bd/1,

where b—source size,

d—a distance from the object to the source,

l—a distance from the object to the detector.

When the source is outside the object, d and l are of same order, andblurriness U is of same order with b, i.e. with the source size. If thesource is inside the object and placed close to the defect to bedetected (here it is a tumor), so d<<1, what explains decreasing of theblurriness of the source.

Due to the small size of a focal spot of an integral lens the blurrinessdecreases more, what allows to make less irradiations to obtain thesufficient accuracy of the image reconstruction. Due to the possibilityof alignment of a focus with any desired point inside the area understudy a procedure of the image formation when examining a small objectcan be simplified. For example, if it is necessary to examine an area of1 cm² size order of lungs, an output focus of a lens can be placeddirectly close to this selected area. The focus can be displaced in thisarea with an accuracy, being equal to the focal spot of the lens. If,for example, a focal distance is 20 cm, so this focal spot is of 0.1 mmsize order at the energy 50 keV, when θcr≈510⁻⁴ rad.

FIG. 26 depicts the geometry where an element 40 conventionallyrepresents a presence of rigid connection between a source 2, a fullintegral lens 2 and a detector 35. At tomography examination these threeobjects must rotate respectively to a means for patient positioning 39as an integral part (a variant of rotating of the means for positioningtogether with a patient, when the source 2, the lens 1 and the detector35 are fixed, is possible as well).

FIG. 27 and FIG. 28 depict the usage of integral lenses in radiotherapy,when obtained result is provided by their higher indexes, such as a sizeof a focal spot and a focal distance, which defines a size of a focalspot with other things being equal. FIG. 27 depicts a device forradiotherapy, a point source 2 is used in, and FIG. 28 depicts a sourceof parallel radiation 16, for example an output of a nuclear reactor oraccelerator, forming quasi-parallel beams of thermal or epithermalneutrons. The radiation is directed to the patient 39 and it is focusedinside the tumor 41. A neutron beam extracts from the reactor, and todirect the beam for usage in the device for radiotherapy it is necessaryto turn it by means of a lens (not only integral one) with a curvedlongitudinal axis.

Providing a high intensity irradiation on a tumor in combination with alow irradiation of surrounding tissues and skin is a serious problem inradiotherapy. It is necessary for this purpose to cross the beams on thetumor at wide angles. The wider are these angles, the larger area of theskin surface and tissues, surrounding the tumor, is covered by theradiation before it reaches the tumor.

An integral lens as a means for focusing the radiation, in particular,the lens, described above, where an effect of radiation “pressing”against the external sides of the channels walls takes place, hasprecisely those features, which are necessary to solve these problems:it can provide high quality of focusing at a considerable ratio of anoutput aperture to a focal distance (the latter feature contributes towider angles of crossing of the beams, which converge at focusing).

The suggested device can comprise some lenses, irradiating the tumorfrom different positions, to create the large doze gradients on thetumor. A system of lenses can be made with a capability of beingdisplaced with maintenance of the cross of the beams, formed by lenses,on the tumor.

Experiments, carried out, show that even at small energies of 25-30 keVorder on depth of 30 cm a doze on the tumor can exceed a doze on thesurface. Water phantom of 1-5 cm thickness were used in the experiment.

FIG. 29 and FIG. 30 depict schematically the devices for a lithography,the suggested integral lens can be used in as well.

The first one, intended for a contact lithography, comprises a means 43for a resist and substrate placing. This means is placed close to ameans 42 for a mask placing. The latter is placed opposite an outputface of the integral half-lens 14, which forms a quasi-parallel beamfrom the divergent beam of the source 2. In this case a homogeneity of aquasi-parallel beam, i.e. a steadiness of the radiation density alongits cross section, is very important. Therefore X-ray lithography is afield, where it is necessary to use integral lenses, comprisingsublenses without envelopes.

A device for projection lithography differs from the considered one,that a “bottle shaped” lens 16, faced its smaller face to the means 43for a resist and substrate placing, is placed between the means 42 for amask placing and the means for a substrate with a resist placing. Thesize of the larger face of the lens approximates that of the output endof the half-lens 14. A presence of the “bottle shaped” lens 16, orientedin the manner, provides image transmission of the mask to the resistwith decreasing. The degree of decreasing of the image scale is definedby a relationship of the input and output diameters of the lens. Arelationship of diameter of the separate channels (capillaries) on theinput and output of the lens is the same. As this relationship can bemuch more than 1, the elements of microelectronics of small sizes can beobtained when using a device for projection lithography. Usage ofsublenses without envelopes in the “bottle shaped” lens 16, used in thedevice for the projection lithography, is important in a greater extentthan in the half-lens 14.

In summary, it should be further emphasized that going from themonolithic lenses and the lenses, made as an assembly of microlenses tothe integral lenses as a new generation of means for high energiesradiation controlling not only provides the increase of indexes accuracyof means, including such lenses, according to the indexes of lenses. Insome cases this going makes possible to produce devices, acceptable forpractical use (being transportable, suitable for hermetization when usedin corrosive medium, and having acceptable cost). In the past the sizes,cost, etc. of the lenses, as well as the impossibility of usage ofsimple and cheap radiation sources prevent from producing the devices.

While the invention has been described in terms of a single preferredembodiment, those skilled in the art will recognize that the inventioncan be practiced with modification within the spirit and scope of theappended claims.

We claim:
 1. A lens for transforming a radiation, representing a neutralor charged particle flux, comprising radiation transporting channels,adjoining their walls, with total external reflection and oriented bythe input ends so that to capture the radiation of the source in use,wherein, the said lens is made as a package of sublenses of a variousdegree of integration, a sublens of a least degree of integrationrepresents the package of radiation transporting channels, which isgrowing out of the joint drawing and forming a bundle of capillaries atthe pressure of the gaseous medium in the space between them being lessthan the pressure in the capillaries of the channels and the temperatureof softening of the material and splicing the neighboring capillaries, asublens of each higher degree of integration represents a package ofsublenses of the previous degree of integration, which is growing out oftheir joint drawing and forming at the pressure of the gaseous medium inthe space between them being less than the pressure in the channels ofsublenses and the temperature of softening of the material and splicingthe neighboring sublenses, all sublenses of the highest degree ofintegration are combined in a unified structure, which is growing out oftheir joint drawing and forming at the pressure of the gaseous medium inthe space between them being less than the pressure in the channels ofsublenses and the temperature of softening of the material and splicingthe neighboring sublenses and at change of drawing speed to form ofbarrel-shaped thickenings, the ends of the said unified structure arecut off and they form an input and output faces of the lens.
 2. A lensaccording to claim 1, wherein the walls of radiation transportingchannels have an interior cover of one or more layers, made of one andthe same or different chemical elements.
 3. A lens according to claim 1or claim 2, wherein the said lens is made with a capability oftransforming of a divergent radiation to a quasi-parallel one or viceversa, for which purpose some ends of the radiation transportingchannels are oriented to a focal spot, and the other are parallel toeach other.
 4. A lens according to claim 1 or claim 2, wherein the saidlens is made with a capability of changing of across sizes of a beam onthe output in comparison with the input across sizes, for which purposethe said lens has a shape of axi-symmetric body with a geneatrix, havinga knee, and the ends of channels, being parallel to the longitudinalaxis, thus diameters of the lens from the input and output sides aredifferent.
 5. A lens according to claim 1 or claim 2, wherein the saidlens is made with a capability of focusing of a divergent radiation, forwhich purpose the input and output ends of the radiation transportingchannels are oriented respectively to the first and second focal spots.6. A lens according to claim 5, wherein a relationship between theacross size and, at least, a curvature radius of the radiationtransporting channels, being peripheral with respect to the opticalaxis, is chosen from the condition that the cross-section of the outputends of the said channels are only partially filled with radiation.
 7. Alens according to claim 5 wherein the part, adjoining to the opticalaxis, of the said lens is made with a capability of being opaque for thesaid radiation.
 8. A lens according to claim 5 wherein the said lens ismade with different curvature radiuses of the radiation transportingchannels on the part of input and output.
 9. A lens according to claim 5wherein the channels of one or some sublenses, located near to thelongitudinal axis of the lens, are made with a capability of theradiation transporting in them at a single total external reflection orwithout it.
 10. A lens according claim 1 or claim 2, wherein allsublenses of the highest degree of integration are composed in a commonenvelope, which is an external envelope of the lens.
 11. A lensaccording to claim 10, wherein the said lens is made with a capabilityof a divergent radiation focusing, for which purpose the input andoutput ends of the radiation transporting channels are orientedrespectively to the first and second focal spots.
 12. A lens accordingto claim 10, wherein a relationship between an across size and, atleast, a curvature radius of the radiation transporting channels, beingperipheral with respect to the optical axis, is chosen from thecondition that the cross-section of the output ends of the said channelsare only partially filled with radiation.
 13. A lens according to claim10, wherein the said lens is made with a capability of transforming adivergent radiation to quasi-parallel one or vice versa, for whichpurpose some ends of the radiation transporting channels are oriented tothe focal spot, and the others are parallel to each other.
 14. A lensaccording to claim 10, wherein the said lens is made with a capabilityof changing of an across size of a beam on the output in comparison withthe input across size, for which purpose the said lens has a shape of anaxi-symmetric body with a geneatrix, having a knee, and the ends ofchannels, being parallel to the longitudinal axis, thus diameters of thelens from the input and output sides are different.
 15. A lens accordingto any one of claims 1, 2, 6-9, or 11-14, wherein the sublenses andenvelopes are made of the same material, as the radiation transportingchannels, or close to the said material on the thermal expansioncoefficient.
 16. An analytical device, comprising a radiation source,representing a neutral or charged particle flux, a means for placing theobject under study placing with a capability of being acted by aradiation of the said, one or more detectors of radiation, placed with acapability of being acted by a radiation, transmitted through the objectunder study or excited in it, one or more lenses for transforming theradiation of the said source or the radiation, excited in the objectunder study, the said lenses being placed on the radiation way from thesaid source to the object under study and on the way from the latter toone or some said radiation detectors, the said lenses comprise thechannels, adjoining their walls, for the radiation transporting withtotal external reflection, the said channels are oriented by their inputends with a capability to capture the radiation, wherein at least one ofthe said lenses is made as a package of sublenses of various degree ofintegration, thus a sublens of the least degree of integrationrepresents a package of channels for the radiation transporting, whichis growing out of joint drawing and forming the bundle of capillaries atthe pressure of the gaseous medium in the space between them being lessthan the pressure in the channels of capillaries and the temperature ofsoftening of the material and splicing the walls of the neighboringcapillaries, a sublens of each higher degree of integration represents apackage of sublenses of the previous degree of integration, which isgrowing out of their joint drawing and forming at the pressure of thegaseous medium in the space between them being less than the pressure inthe channels of sublenses and the temperature of softening of thematerial and splicing the neighboring sublenses and at change of drawingspeed to form of barrel-shaped thickenings, all sublenses of the highestdegree of integration are combined in a unified structure, which isgrowing out of their joint drawing and forming at the pressure of thegaseous medium in the space between them being less than the pressure inthe channels of sublenses and the temperature of softening of thematerial and splicing the neighboring sublenses, the ends of the saidunified structure are cut off and form an input and output faces of thelens.
 17. An analytical device according to claim 16, wherein it is madewith a capability of scanning of the surface or the volume of the objectunder study by means of the aligned focuses of the lenses, placed on theway from the said source to the object under study and from the last oneto the detector.
 18. An analytical device according to claim 17, whereinthe lens, placed on the radiation way from the object under study to thedetector, is made with a capability of forming a quasi-parallel beam,the crystal-monochromator or the multilayer diffraction structure areplaced between the said lens and the detector with a capability ofvarying of their placement and the angle of arrival on them of the saidquasi-parallel beam to provide the fulfilling the Bragg condition forthe different lengths of the radiation waves, excited in the objectunder study.
 19. An analytical device according to claim 16, wherein asynchrotron or some other source, producing the parallel beam, is usedas the said source, the lens, placed on the radiation way of the saidsource to the object under study, is made with a capability of focusingsuch a beam.
 20. An analytical device according to claim 16, wherein amicrofocal X-ray source with a “through” anode is used as a source. 21.An analytical device according to claim 16, wherein the said sourcerepresents a source of a broadband X-rays, being transportedsimultaneously by two lenses, which are made with a capability offorming a quasi-parallel beam, one of the crystal-monochromators isplaced between the output of each of the said lenses and a means forpositioning the object under study, thus each of the saidcrystal-monochromators is placed with a capability either of extractionof the radiation, which has a wavelength lower, or with a capability ofextraction of the radiation, which has a wavelength higher than theabsorption line of the element, which presence is tested in the objectunder study, the device comprises two detectors, each of them is placedafter the device for the object under study positioning in such way,that to receive the radiation, formed by one of thecrystal-monochromators and passed through the object under study.
 22. Ananalytical device according to claim 16, wherein the said devicecomprises one more source along with the said source, both sources areX-ray sources, thus the radiation of one source has a wavelength lower,and the radiation of the other one has a wavelength higher than theabsorption line of the element, which presence is tested in the objectunder study, each of the said lenses is placed either between eachsource and the means for the object under study positioning, the saidlenses are made with a capability of forming a quasi-parallel beam, thedevice comprises two detectors, each of the said detectors is placedafter the means for the object under study positioning so that toreceive the radiation, formed by one of the said lenses and passedthrough the object under study.
 23. An analytical device according toclaim 16, wherein the said source represents an X-ray source with ananode, providing a radiation with two characteristic wavelengths, lowerand higher than the line of the absorption of the element, whichpresence is tested in the object under study, one lens, made with acapability of forming a quasi-parallel beam, is placed between thesource and the means for the object under study positioning, a rotatingscreen with alternating windows, covered by filters, being transparentfor one and opaque for another said wavelengths, is placed before ofafter the said lens.
 24. An analytical device according to claim 16,wherein the lens and the secondary target are placed on the radiationway from the said source to the object under study, thus the lens ismade with a capability of focusing the radiation of the source on thesecondary target.
 25. An analytical device according to claim 24,wherein the second lens, made with a capability of forming aquasi-parallel radiation, is placed between the secondary target and themeans for object under study positioning.
 26. An analytical deviceaccording to claim 24 or claim 25, wherein the secondary target is madeof beryllium (Be) or some other light metal.
 27. An analytical deviceaccording to claim 16, wherein the lens, and the crystal-monochromator,or the multilayer diffraction structure are placed in turn on theradiation way from the said source to the object under study, thus thelens is made and oriented with a capability of forming a quasi-parallelbeam, falling on the crystal-monochromator or the multilayer diffractionstructure at the angle of 45° for the radiation forming or polarizing,and the detector is located at the angle of 90° to the direction of thepolarized radiation propagating.
 28. An analytical device according toclaim 16, wherein the lens and the crystal-monochromator are placed inturn on the radiation way from the said source to the object understudy, thus the lens is made and oriented with a capability of forming aquasi-parallel beam, falling on the crystal-monochromator at the Braggangle, the crystal, identical to the said one, is placed on theradiation way from the object under study to the detector, the crystalis placed parallel or with a minor variation from parallel to the saidone in order to provide the possibility of fixing by the detector aphase contrast of the areas of the object under study, having variousdensity and causing different refraction of the radiation, falling onthe said areas.
 29. An analytical device according to claim 16, whereinan X-ray source is used as the said source, the means for the objectunder study positioning is made with a capability of examining the partsor organs of the human body.
 30. An analytical device according to claim29, wherein an X-ray source comprises a molybdenum (Mo) anode, the meansfor the object under study positioning is made with a capability ofcarrying out of mammography investigations.
 31. An analytical deviceaccording to claim 30, wherein the said lens, placed on the radiationway from the X-ray source with the molybdenum (Mo) anode to the objectunder study, is made with a capability of forming a quasi-parallel beamwith the cross-section, being enough for simultaneous acting on thewhole area under study, the detector is placed with a capability ofproviding a distance between the said detector and the object understudy not less than 30 cm.
 32. An analytical device according to claim29, wherein the said device is made with a capability of the rotatingmovement with respect to each other, on one hand, the means for theobject under study positioning, and, on the other hand, the radiationsource, the lens, placed between the source and the means for the objectunder study positioning, and the detector, which output is connected tothe computer means for detection results processing, thus the lens ismade with a capability of focusing inside the object under study theradiation, formed by the source.
 33. A device for radiotherapy,comprising one or more radiation sources, representing a neutral orcharged particle flux, and the means for patient's body or its partpositioning to be irradiated, wherein the lens for radiation focusing onthe patient's tumor is placed between each of the said sources and thesaid means for positioning, the said lens comprises channels, adjoiningtheir walls, for radiation transporting with the total externalreflection, the said channels are oriented by their input ends with acapability to capture the transported radiation, the said lens is madeas a package of sublenses of various degree of integration, thus asublens of the least degree of integration represents a package of theradiation transporting channels, which is growing out of joint drawingand forming the capillary bundle at the pressure of the gaseous mediumin the space between them being less than the pressure in the channelsof capillaries and the temperature of the material softening andsplicing the neighboring capillaries, the sublens of each higher degreeof integration represents the package of sublenses of the previousdegree of integration, which is growing out of their joint drawing andforming at the pressure of the gaseous medium in the space between thembeing less than the pressure inside the channels of sublenses and at thetemperature of the material softening and splicing the neighboringsublenses, all sublenses of the highest degree of integration arecombined in an unified structure, which is growing out of their jointdrawing and forming at the pressure of the gaseous medium in the spacebetween them being less than the pressure in the channels of sublensesand at the temperature of the material softening and splicing theneighboring sublenses and at change of drawing speed to form ofbarrel-shaped thickenings, the ends of the said unified structure arecut off and form an input and output faces of the lens.
 34. A device forradiotherapy according to claim 33, wherein the outputs of the atomicreactor or accelerator, forming quasi-parallel beams of thermal orepithermal neutrons, are used as the said sources.
 35. A device forradiotherapy according to claim 34, wherein the said lenses are madewith a capability of turning the neutron beams.
 36. A device for contactX-ray lithography, comprising the soft X-ray source, the lens fortransforming the divergent radiation of the said source toquasi-parallel, the said lens comprises the channels, adjoining theirwalls, for radiation transporting with total external reflection, andthe means for the mask and substrate with the resist, coated on it,placing, wherein the said lens is made as a package of sublenses ofvarious degrees of integration, thus the sublens of the least degree ofintegration represents the package in a common envelope of radiationtransporting channels, which is growing out of joint drawing and formingthe capillary bundle at the pressure of the gaseous medium in the spacebetween them being less than the pressure in the channels of capillariesand at the temperature of the material softening and splicing theneighboring capillaries, each sublens of the higher degree ofintegration represents the package of sublenses of the previous degreeof integration, which is growing out of their joint drawing and formingat the pressure of the gaseous medium in the space between them beingless than the pressure in the channels of sublenses and at thetemperature of the material softening and splicing the neighboringsublenses, all sublenses of the highest degree of integration arecombined in a unified structure, which is growing out of their jointdrawing and forming at the pressure of the gaseous medium in the spacebetween them being less than the pressure in the channels of sublensesand at the temperature of the material softening and splicing theneighboring sublenses and at change of drawing speed to form ofbarrel-shaped thickenings, the ends of the said unified structure arecut off and form an input and output faces of the lens.
 37. A device forprojection X-ray lithography, comprising the soft X-ray source, the lensfor transforming the divergent radiation of the said source toquasi-parallel, which is intended for the mask irradiating, a means forthe mask locating, the lens for transforming the X-ray image of the maskwith decreasing size on the resist, the means for the substrate withresist, coated on it, locating, thus both said lenses comprise channels,adjoining their walls, for radiation transporting with the totalexternal reflection, wherein at least on of the said lenses is made as apackage of sublenses of various degree of integration, thus the sublensof the least degree of integration represents a package of the radiationtransporting channels, which growing out of joint drawing and formingthe capillary bundle at the pressure of the gaseous medium in the spacebetween them being less than the pressure in the channels of capillariesand at the temperature of the material softening and splicing of theneighboring capillaries, the sublens of each higher degree ofintegration represents a package of sublenses of the previous degree ofintegration, which is growing out of their joint drawing and forming atthe pressure of the gaseous medium in the space between them being lessthan the pressure in the channels of sublenses and at the temperature ofthe material softening and splicing the neighboring sublenses, allsublenses of the highest degree of integration are combined in a unifiedstructure, which is growing out of their joint drawing and forming atthe pressure of the gaseous medium in the space between them being lessthan the pressure in the channels of sublenses and at the temperature ofthe material softening and splicing the neighboring sublenses and atchange of drawing speed to form of barrel-shaped thickenings, the endsof the said unified structure are cut off and form an input and outputfaces of the lens, thus the input diameters of the radiationtransporting channels of the second of the said lenses exceed the outputdiameters.